photomask

Cluster Tool Inspection Systems, Inc. (CTIS, Inc.)

Surface Analysis
Defect detection to 0.10 microns
Single load R&D systems
Automated systems
OEM oppurtunites
Simultaneous dual sided inspection
Inspection Applications:
Photomask / Pellicles / Wafer / Disc / Flat Panel

Patterned and Non Patterned Applications
Simultaneous Dual Sided Inspection
Windows NT

Particles, Scratches, Haze, Inclusions, Pits
Critical Dimension, Multi-Task Single Pass

Wafers
Disc
Photomask
Flat Panel Display
Standard Mechanical Interface
Cluster Tool Integration Solutions
Front Opening Unified Pods
Mini Environments
Production Oriented
Research & Development Systems
Custom Designed Inspection Systems

OEM opportunities exist for our surface scanners

Ph.: 508-240-7195
Fax: 508-240-7185

Surface Analsysis Systems